Page 34 - 《真空与低温》2026年第2期

第 32 卷 第 2 期 真空与低温
2026 年 3 月 Vacuum and Cryogenics 153

双 腔 或 多 腔 体 封 装 器 件 的 密 封 检 测

肖汉武，陈 婷 *
（无锡中微高科电子有限公司，江苏 无锡 214035）

摘要：由于双腔或多腔体封装器件的各个内空腔容积不尽相同，采用传统的氦质谱细检漏法进行密封试验时，
如果选择的固定方法试验条件不恰当，存在个别腔体因漏率判据偏松风险，有可能导致漏检。论文从多腔体封装
的漏率判据选择、加压条件选择等方面进行了讨论，并提出了相应的解决方案，同时对腔体泄漏定位方法进行了
讨论。
关键词：双腔或多腔体封装；扩展的固定方法试验条件；光学检漏
中图分类号：TB77 文献标志码：A 文章编号：1006-7086（2026）02-0153-08
DOI：10.12446/j.issn.1006-7086.2026.02.005

Hermeticity Testing of Dual or Multi-cavity Sealed Devices

*
XIAO Hanwu，CHEN Ting
（Wuxi ZhongWei High-tech Electronics Co. Ltd.，Wuxi 214035，Jiangsu，China）

Abstract：SiP device may require two or more sealed cavities，and the internal free volumes of these individual cavities
often differ. When conducting sealing tests using traditional helium mass spectrum fine leak test，a problem arises if these
cavity volumes fall into different classification ranges. If inappropriate bomb conditions from the fixed method procedures are
selected，the leak rate criterion for some cavities may be too lenient. For example，in a certain dual-cavity CQFP240 package，
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the internal free volume of cavity 1 is 0.27 cm ，and the internal free volume of cavity 2 is 0.43 cm . These volumes fall into
the 0.1 ⩽V< 0.4 and 0.4 ⩽V< 1.0 classification ranges，respectively. Clearly，the failure criterion for the equivalent standard
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leak rate L corresponding to cavity 1 is 1×10 Pa·cm /s，while the failure criterion for cavity 2 is 1×10 Pa·cm /s. If the bomb
conditions from the fixed method with the minimum bomb pressure and the longest dwell time，i.e.，P E =206 kPa and t 1 =1 h，
are selected based on the internal free volume of cavity 2，then the measured leak rate corresponding to the failure criterion
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for the equivalent standard leak rate L for cavity 1 is 1.93×10 Pa·cm /s. This value is less than the measured leak rate rejec-
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tion limit of R 1 =3×10 Pa·cm /s. This leads to the risk of failed leak detection. This paper discusses the selection of leak rate
criteria and bomb conditions for dual or multi-cavity packages. A solution is proposed to extend the bomb conditions used in
the fixed method procedures. According to calculation results，by applying the extended bomb conditions for fixed method
fine leak testing，the measured leak rates corresponding to the failure criterion of the equivalent standard leak rate L are all
greater than the rejection limit R 1 . Furthermore，methods for locating the leaking cavity in dual or multi-cavity packages are
discussed.
Key words：dual or multi-cavity package；extended conditions for the fixed method；optical leak testing.

0 引言 候很难将所有器件或元件组装在一个封装腔体内，

近年来系统级封装 SiP（System in Package）技 在这种情形下，具有两个或多个腔体的单个封装应
术发展迅猛，多种异质器件或元件被集成在一个独 运而生。
立的封装体中，以满足多功能、微型化的模块化应 单个封装体中的两个或多个腔体往往是独立
用需求。由于集成元件的复杂性及工艺特点，有时 的，这些腔体的气密封接可采用相同的封接工艺或

收稿日期：2026−01−22
作者简介：肖汉武，高级工程师。E-mail：hwxiao0106@163.com
通信作者：陈婷，工程师。E-mail：chenwang6152@163.com