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第 41 卷     第 5 期                        摩  擦  学  学  报                                  Vol 41   No 5
            2021  年 9  月                                 Tribology                                   Sept, 2021


            DOI: 10.16078/j.tribology.2020240



                    原子氧对非平衡磁控溅射MoS -Ti复合薄膜
                                                                             2
                                       真空摩擦学性能的影响




                                                               *
                                                                        *
                                        胡汉军, 张凯锋, 周  晖 , 刘兴光 , 郑玉刚
                            (兰州空间技术物理研究所 真空技术与物理国防科技重点实验室, 甘肃 兰州 730000)
                摘   要: 对采用非平衡磁控溅射方法制备的柱状晶MoS 2 -Ti复合薄膜开展了原子氧(AO)辐照试验. 原子氧的平均动
                                        22
                                                 2
                能是5 eV，累计辐照通量6.0×10 atoms/cm . 原子氧造成薄膜表面出现“绒毯”状形貌，表层的MoS 2 和内部的低价钛
                氧化物分别被氧化成硬质的MoO 3 和TiO 2 ，但原子氧对距表层30 nm以下Mo的化学态没有影响. 薄膜的初始真空摩
                                                                                    −17
                                                                                       3
                                                           −17
                                                              3
                擦系数和磨损率分别由辐照前的大约0.018和4.49 × 10  m /(N·m)升高至0.03 和5.5×10  m /(N·m)，磨损机制也发
                生了由黏着磨损向磨粒磨损的转变.
                关键词: MoS 2 -Ti薄膜; 原子氧辐照; 真空; 化学组成; 摩擦机制
                中图分类号: TH117.3                  文献标志码: A                   文章编号: 1004-0595(2021)05–0627–09
                      Influence of Atomic Oxygen on the Vacuum Tribological
                       Performance of MoS -Ti Composite Films Deposited by
                                                   2
                                     Unbalanced Magnetron Sputtering


                                                               *              *
                           HU Hanjun, ZHANG Kaifeng, ZHOU Hui , LIU Xingguang , ZHENG Yugang

                        (National Key Laboratory of Science and Technology on Vacuμm Technology and Physics, Lanzhou
                                       Institute of Physics, CAST, Gansu Lanzhou 730000, China)
                 Abstract: MoS 2 -Ti composite film with columnar microstructure was fabricated by unbalanced magnetron sputtering,
                                                                                               22      2
                 and was irradiated by an atomic oxygen (AO) beam with 5eV kinetic energy and total fluence of 6.0×10  atoms/cm .
                 The MoS 2 -Ti composite film exhibited a “blanket-like” surface morphology after AO irradiation. The MoS 2  phase on
                 the film surface (within the depth of ~30 nm) and titanium suboxides (e.g. TiO 2-x , where 0<x<2) inside the film were
                 oxidized by AO into MoO 3  and TiO 2 , respectively, leaving the MoS 2  beneath the top 30 nm oxidation layer uninfluenced
                 were oxidized to MoO 3  and TiO 2,  leaving unchanged chemical state of element Mo in the film. After AO irradiation,
                                                                             −17  3            −17  3
                 initial friction coefficient and wear rate increased from 0.018 to 0.03 and 4.49 × 10  m /(N·m) to 5.5 × 10  m /(N·m),
                 respectively, and its friction mechanism was transformed from adhesion to abrasion.
                 Key words: MoS 2 -Ti film; AO irradiation; vacuum; chemical components; tribological mechanism

                在200~700 km 的低轨环境中，主要的辐照环境是                    滑材料的损伤机理主要是氧化侵蚀和溅射损耗                    [4-5] . 典
            原子氧效应和紫外辐照，其中原子氧对大多数润滑材                            型的非金属润滑材料(包括MoS 、WS 、石墨、有机润
                                                                                          2
                                                                                               2
            料具有明显的破坏作用           [1-2] . 由于飞行器的轨道速率达           滑油、有机润滑脂和聚合物自润滑材料等)均会与原
            到大约8 km/s，使得原子氧具有相当于5 eV的动能，极                      子氧发生氧化反应，生成易挥发性物质而造成材料的
                                       [3]
            易侵蚀大多数非金属润滑材料 . 原子氧对非金属润                           质损和化学组成的变化，使材料的摩擦学性能下降                     [6-7] .


            Received 1 November 2020, revised 29 November 2020, accepted 7 December 2020, available online 28 September 2021.
            *Corresponding author. zhouhui510@sina.com, Tel: +86-931-4585588; sdwfcllxg@icoud.com, Tel: +86-931-4585294.
            The project was supported by the National Equipment Advanced Research Foundation of China (61409220205).
            装备预研领域基金项目(61409220205)资助.
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