Page 41 - 《摩擦学学报》2021年第4期

第 41 卷 第 4 期 摩 擦 学 学 报 Vol 41 No 4
2021 年 7 月 Tribology Jul, 2021

DOI: 10.16078/j.tribology.2020189

含氢无定型碳摩擦转移膜结构演化规律研究

2
1,2
2
1*
宁可心 , 王 鹏 , 江海霞 , 王 毅 , 柴利强 2*
(1. 兰州理工大学 石油化工学院，甘肃 兰州 730050;
2. 中国科学院兰州化学物理研究所 固体润滑国家重点试验室，甘肃 兰州 730000)
摘 要: 利用中频磁控溅射系统制备a-C:H润滑薄膜，并使用球-盘摩擦机考察了空气和干燥氮气(N 2 )氛围中a-C:H薄
膜摩擦行为的差异，讨论了随着摩擦时间增加，薄膜上磨痕及Al 2 O 3 对偶球上转移膜的结构变化对摩擦行为的影响.
试验结果显示：a-C:H薄膜在干燥氮气中摩擦具有比在空气中更低的摩擦系数和更长的磨损寿命. 微观结构分析表
明，转移膜可以起到降低摩擦的作用，在干燥氮气中，随着摩擦进行，Al 2 O 3 对偶球上逐渐形成具有典型DLC特征的
碳转移膜并稳定地存在，这是摩擦性能进一步提高的原因. 此外，在干燥氮气中摩擦，磨痕表面和对偶球上转移膜
表面结构均趋于“石墨化”. 上述二者的共同作用使得a-C:H薄膜在N 2 环境下比在空气中更低的摩擦磨损.
关键词: a-C:H薄膜; 转移膜; 演化; 摩擦磨损; 石墨化
中图分类号: TH117.3 文献标志码: A 文章编号: 1004-0595(2021)04–0484–09

Structural Evolution of the Transfer Film of a-C:H

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NING Kexin , WANG Peng , JIANG Haixia , WANG Yi , CHAI Liqiang 2*
(1. College of Petrochemical Technology, Lanzhou University of Technology, Gansu Lanzhou 730050, China
2. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese
Academy of Sciences, Gansu Lanzhou 730000, China)
Abstract: In this study, a-C:H film was prepared by midfrequency reactive magnetron sputtering system, and a ball-on-
disk reciprocating tribometer was used to investigate the friction behaviors of a-C:H film in air and dry nitrogen (N 2 )
atmospheres. The influence of structural changes of wear tracks and transfer films on Al 2 O 3 counterpart balls between
sliding interfaces on friction behaviors were discussed. The results showed that the a-C:H film had lower friction
coefficient and longer wear life in nitrogen than in air. The microstructure analysis showed that the transfer film reduces
friction. In dry nitrogen, a stable carbon transfer film with typical DLC characteristic formed on Al 2 O 3 counterpart balls,
which further improved the friction performance. In addition, in dry nitrogen, the structure of the wear track and the
transfer film tended to be “graphitized”. Therefore, it is the combined action of the above two that resulted in lower
friction and wear of a-C:H film in N 2 atmosphere than in air.
Key words: a-C:H film; transfer film; evolution; friction and wear; graphitization

含氢非晶碳(a-C:H)薄膜，以其优异的机械性能、 数升高，但干燥氮气中却可以实现超低摩擦 [9-11] . 有学
减摩性和耐磨性，成为一种非常理想的固体润滑材 者认为，N 气氛下对偶球上形成的转移膜是a-C:H薄
2
料 [1-4] . 然而DLC薄膜在改变相对湿度和测试环境时会 膜低摩擦的原因 [12-14] . 但在a-C:H薄膜的摩擦过程中，
表现出不同的摩擦行为 [5-8] . a-C:H薄膜在干燥空气中 对偶若是比其软的材料，转移膜则是从对偶球向薄膜
的摩擦系数为0.05~0.3，并且随相对湿度增加，摩擦系 磨痕表面转移的，这种情况下同样可以获得相对较低

Received 4 September 2020, revised 10 November 2020, accepted 11 November 2020, available online 28 July 2021.
*Corresponding author. E-mail: wangyi@lut.edu.cn, Tel: +86-13519643117; chailiqiang423@licp.cas.cn, Tel: +86-15095338702.
The project was supported by CAS “Light of West China” Program.
西部之光交叉团队项目资助.