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576                                         真空与低温                                   第 31 卷 第  5  期


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              引文信息:周敏,刘帅,王庆业,等. 基底偏压对                TiAlN  涂层微观结构及摩擦学性能影响[J]. 真空与低温,2025,31(5):
                      569−576.
                      ZHOU  M, LIU  S, WANG  Q  Y, et  al.  Effect  of  bias  voltage  on  microstructure  and  mechanical  properties  of  TiAlN
                      coating[J]. Vacuum and Cryogenics,2025,31(5):569−576.
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