Page 37 - 《真空与低温》2025年第5期
P. 37
576 真空与低温 第 31 卷 第 5 期
tion of the corresponding nitrides[J]. Surface and Coatings Science,2013,279:450−457.
Technology,1999,116/119:1093−1101. [23] YANG K,XIAN G,ZHAO H,et al. Effect of Mo content
[20] CAO H S,LIU F J,LI H,et al. Effect of bias voltage on micro- on the structure and mechanical properties of TiAlMoN
structure, mechanical and tribological properties of TiAlN films deposited on WC–Co cemented carbide substrate by
coatings[J]. Transactions of Nonferrous Metals Society of
magnetron sputtering[J]. International Journal of Refracto-
China,2022,32(11):3596−3609.
ry Metals and Hard Materials,2015,52:29−35.
[21] 杜建融,陶冠羽,陈辉,等. 偏压对 HiPIMS 制备 TiAlSiN
[24] STAIA M H,PÉREZ-DELGADO Y,SANCHEZ C,et al.
涂 层 结 构 与 性 能 的 影响 [J]. 材 料 保 护 , 2024, 57(7):
Hardness properties and high-temperature wear behavior of
30−42.
nitrided AISI D2 tool steel, prior and after PAPVD
[22] CAI J B,WANG X L,BAI W Q,et al. Bias-graded deposi-
coating[J]. Wear,2009,267(9/10):1452−1461.
tion and tribological properties of Ti-contained a-C gradi-
ent composite film on Ti 6 Al 4 V alloy[J]. Applied Surface (责任编辑:郭 云)
引文信息:周敏,刘帅,王庆业,等. 基底偏压对 TiAlN 涂层微观结构及摩擦学性能影响[J]. 真空与低温,2025,31(5):
569−576.
ZHOU M, LIU S, WANG Q Y, et al. Effect of bias voltage on microstructure and mechanical properties of TiAlN
coating[J]. Vacuum and Cryogenics,2025,31(5):569−576.

