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328                                         真空与低温                                   第 31 卷 第  3  期


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              引文信息:韩晓东,张虎忠,习振华,等. 温度对              MEMS  电容薄膜真空计测量性能的影响研究[J]. 真空与低温,2025,31(3):
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                      aphragm gauge[J]. Vacuum and Cryogenics,2025,31(3):322−328.
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