Page 58 - 《真空与低温》2025年第3期

第 31 卷 第 3 期 真空与低温
2025 年 5 月 Vacuum and Cryogenics 329

热 阴 极 电 离 真 空 计 温 度 修 正 的 仿 真 与 实 验 研 究

张开旭，李得天，张虎忠，习振华，李 刚，宋云见，李博文，王绥辉
（兰州空间技术物理研究所 真空技术与物理重点实验室，兰州 730000）

摘要：热阴极电离真空计通过加热阴极实现电子热发射，阴极高温引发的温度效应成为影响其测量精度的关
键因素。由于阴极区域的气体温度难以直接测量，基于 Molflow 软件对真空室内不同工况下的热阴极电离真空计
进行模拟分析，获得了空间不同区域的压力分布和气体温度分布。开展了实验测试，观察到了热流逸效应的影响；
电离真空计的压力示值的变化规律与仿真结果较为一致。将壁面温度作为特征量修正灵敏度，为电离真空计示
值压力修正提供了可行方法，提高了热阴极电离真空计的测量精度。
关键词：热阴极电离真空计；热流逸；蒙特卡洛法；温度
中图分类号：TB772 文献标志码：A 文章编号：1006−7086（2025）03−0329−07
DOI：10.12446/j.issn.1006-7086.2025.03.006

Simulation and Experimental Research on Temperature Correction of Hot Cathode Ionization Gauge

ZHANG Kaixu，LI Detian，ZHANG Huzhong，XI Zhenhua，LI Gang，SONG Yunjian，LI Bowen，WANG Suihui
（Science and Technology on Vacuum Technology and Physics Laboratory，
Lanzhou Institute of Physics，Lanzhou 730000，China）

Abstract：The hot cathode ionization gauge，a fundamental instrument for ultra-high vacuum measurement，experiences
limitations in measurement accuracy，partly due to temperature effects induced by the high-temperature cathode. These tem-
perature effects pose challenges due to the interplay of multiple scales and mechanisms，rendering the investigation of tem-
perature effects in ionization gauges particularly complex. The presence of a high-temperature filament increases the tempera-
ture of gas molecules surrounding the ionization gauge，while the pressure in the cathode region is also temperature-depen-
dent. Given that the gas temperature in the cathode region is challenging to measure directly，simulations of the hot cathode
ionization gauge under various operating conditions within the vacuum chamber were performed using Molflow software.
This approach facilitated the acquisition of pressure distributions and gas temperature distributions across different spatial re-
gions. Following the correction of the measured pressure using the thermal transpiration equilibrium equation，the corrected
results aligned more closely with the true values. Experimental tests indicated that as the wall temperature increased，the tem-
perature of gas molecules also rose，resulting in an increase in pressure within the test region. However，the pressure reading
on the ionization gauge decreased. The influence of thermal transpiration was evident，and the variation pattern of the pres-
sure reading on the ionization gauge was found to be relatively consistent with the simulation results. By utilizing the wall
temperature as a characteristic parameter to adjust sensitivity，the pressure results were brought closer to the actual values.
This approach offers a viable method for correcting the indicated pressure of the ionization gauge， thereby enhancing the
measurement accuracy of the hot cathode ionization gauge.
Key words：hot cathode ionization gauge；thermal transpiration effects；Monte Carlo method；temperature

0 引言 气相粒子进行轰击电离，碰撞产生的离子流被收集
热阴极电离真空计具有良好的测量线性、稳 并反演获得真空压力。校准标定后的灵敏度将直
定性和重复性。热阴极发射的电子流在真空中对 接参与待测压力的计算，它受电离截面、电子路径

收稿日期：2025−02−26
基金项目：国家自然科学基金 （62171208）
作者简介：张开旭，硕士研究生。E-mail：1245705617@qq.com