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314 真空与低温 第 31 卷 第 3 期

cathode[J]. Journal of Physics： Conference Series， 2019， ducting molecules[J]. Science，2006，311（5759）：356−359.
1400（5）：055011. [65] FANGET A，TRAVERSI F，KHLYBOV S，et al. Nanopore
[55] SILVA S R P， FORREST R D， SHANNON J M， et al. integrated nanogaps for DNA detection[J]. Nano Letters，
Electron field emission from amorphous silicon[J]. Journal 2014，14（1）：244−249.
of Vacuum Science & Technology B：Microelectronics and [66] OH Y，LEE W，KIM Y，et al. Self-aligned colocalization of
Nanometer Structures Processing， Measurement， and Phe- 3D plasmonic nanogap arrays for ultra-sensitive surface
nomena，1999，17（2）：596-600. plasmon resonance detection[J]. Biosensors & Bioelectron-
[56] HAN J W，SEOL M L，MOON D I，et al. Nanoscale vacuum ics，2014，51：401−407.
channel transistors fabricated on silicon carbide wafers[J]. [67] LI X，CHEN F，WANG J，et al. Nano-air-channel Si pho-
Nature Electronics，2019，2（9）：405−411. todetectors with enhanced responsivity and photocurrent[J].
[57] LIU M，LI T，WANG Y. SiC emitters for nanoscale vacuum [J]. IEEE Electron Device Letters，2025，46（2）：223−226.
electronics：A systematic study of cathode–anode gap by fo- [68] DEAN K A，CHALAMALA B R. The environmental stabili-
cused ion beam etching[J]. Journal of Vacuum Science & ty of field emission from single-walled carbon nanotubes[J].
Technology B：Nanotechnology and Microelectronics，Ma- Applied Physics Letters，1999，75（19）：3017−3019.
terials， Processing， Measurement， and Phenomena， 2017， [69] FANG X，YAN J，HU L，et al. Thin SnO 2 nanowires with
35（3）：031801.
uniform diameter as excellent field emitters：A stability of
[58] BOCHAROV G S，ELETSKII A V. Theory of Carbon Nan-
more than 2 400 minutes[J]. Advanced Functional Materials，
otube （CNT）-based electron field emitters[J]. Nanomateri-
2012，22（8）：1613−1622.
als，2013，3（3）：393−442.
[70] CHEN S，YING P，WANG L，et al. Highly flexible and ro-
[59] HAO T， LI W， LIU Z， et al. Low turn-on field nanodia-
bust N-doped SiC nanoneedle field emitters[J]. NPG Asia
mond conic field emitter[J]. Diamond and Related Materials，
Materials，2015，7（1）：e157.
2017，75：91−95.
[71] WANG L，WEI G，GAO F，et al. High-temperature stable
[60] ZHANG P. Scaling for quantum tunneling current in nano-
field emission of B-doped SiC nanoneedle arrays[J]. Nanos-
and subnano-scale plasmonic junctions[J]. Scientific Reports，
cale，2015，7（17）：7585−7592.
2015，5（1）：9826.
[72] 张天平，耿海，张雪儿，等. 离子电推进技术的发展现状与
[61] BONARD J M，DEAN K A，COLL B F，et al. Field emission
未来 [J]. 上海航天，2019，36（6）：88−96.
of individual carbon nanotubes in the scanning electron mic-
[73] GILCHRIST B， BILÉN S， HOYT R， et al. The PROPEL
roscope[J]. Physical Review Letters，2002，89（19）：197602.
electrodynamic tether mission and connecting to the iono-
[62] XU J， WANG Q， TAO Z， et al. Enhanced electron emis-
sphere[C/OL]. 12th Spacecrft Charging Technology Con-
sion of directly transferred few-layer graphene decorated
ference， 2012： 1-33[2025-05-08]. https://ntrs.nasa.gov/api/
with gold nanoparticles[J]. RSC Advances， 2016， 6（81）：
citations/20120015031/downloads/20120015031.pdf.
78170−78175.
[74] HOLSTE K， DIETZ P， SCHARMANN S， et al. Ion
[63] AMLANI I，RAWLETT A M，NAGAHARA L A，et al. An
thrusters for electric propulsion： Scientific issues develop-
approach to transport measurements of electronic molecul-
ing a niche technology into a game changer[J]. Review of
es[J]. Applied Physics Letters，2002，80（15）：2761−2763.
Scientific Instruments，2020，91（6）：061101.
[64] GUO X F， SMALL J P， KLARE J E， et al. Covalently
bridging gaps in single-walled carbon nanotubes with con- （责任编辑：郭 云）

引文信息：韩熙隆，覃奀垚，章灿然，等. 可集成真空微纳电子器件发展与展望[J]. 真空与低温，2025，31（3）：302−314.
HAN X L，QIN E Y，ZHANG C R，et al. Development and prospects of scalable vacuum micro-nanoscale electronic de-
vices[J]. Vacuum and Cryogenics，2025，31（3）：302−314.