Page 34 - 《真空与低温》2026年第1期

第 32 卷 第 1 期 真空与低温
2026 年 1 月 Vacuum and Cryogenics 31

宽 范 围 、 高 精 度 、 批 量 化 复 合 型 真 空 测 试 校 准

装 置 设 计 与 实 现

刘金生，莫 言，凌 波，张 兵 ，陈 星
*
（中国航天员科研训练中心，北京 100094）

摘要：设计了一种复合型综合真空校准装置，并对其性能进行了系统测试和分析。该装置由多个真空校准室、
流导元件、管路系统、供气系统以及真空获得系统组成，覆盖 1×10 ～1×10 Pa 的宽真空压力校准范围。装置采
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用模块化设计，根据不同真空压力区间的特点，分别采用了静态比较法、动态比较法和动态流量法三种校准方法，
以满足不同真空计的校准需求。测试中使用了多种类型的真空计进行测试校准，对各个压力校准区间的测量不
确定度进行了评定和计算，并且通过传递比较法验证了其在多个校准点上的准确性和一致性。研究结果为宽范
围真空校准技术提供了一种高效、高精度的解决方案，可为真空校准技术的研究和应用提供技术支持。
关键词：复合型；真空；测试；校准装置
中图分类号：TB771 文献标志码：A 文章编号：1006-7086（2026）01-0031-07
DOI：10.12446/j.issn.1006-7086.2026.01.004

Design and Implementation of a Wide-range，High-precision，Batch-processed
Composite Vacuum Test and Calibration Device

*
LIU Jinsheng，MO Yan，LING Bo，ZHANG Bing ，CHEN Xing
（China Astronauts Research and Training Center，Beijing 100094，China）

Abstract：During the exploration of spaceflight missions，vacuum sensors directly undertake pivotal tasks including pre-
ssure monitoring of the space vacuum environment，vacuum degree regulation inside the vacuum cabin，and vacuum state feed-
back for propellant delivery. Their performance stability and measurement accuracy directly determine the effectiveness of
mission execution and the operational safety of spacecraft. It is necessary to accurately obtain the measurement characteristic
parameters of vacuum sensors in space-simulated vacuum environments and verify their performance stability and environmental
adaptability under extreme vacuum conditions. Systematic errors and random errors should be eliminated through standard-
ized calibration methods，so as to ensure the accuracy，consistency and traceability of the sensor measurement data. This provi-
des authoritative data support and technical guarantee for the R&D optimization，type selection and adaptation of sensors，as
well as their reliable application in spaceflight missions. This paper introduces the design and implementation of a novel inte-
grated composite vacuum calibration device，as well as systematic testing and analysis of its performance. Composed of mul-
tiple vacuum calibration chambers，flow conductance components，piping systems，gas supply systems，and vacuum generation
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systems，the device can cover a wide pressure range of 1×10 Pa to 1×10 Pa. Adopting a modular design，the device employs
three calibration methods—static comparison method，dynamic comparison method，and dynamic flow method—to meet
the calibration requirements of various vacuum gauges according to the characteristics of different pressure ranges. During
testing，multiple types of vacuum gauges were used for calibration，and the results demonstrated that the device achieved high
precision levels with expanded uncertainties across all pressure ranges. The accuracy and consistency at several key points were
verified via transfer comparison methods，demonstrating the device's excellent versatility and stability. The research findings
provide an efficient and high-precision solution for wide-range vacuum measurement technology and enable batch calibration

收稿日期：2025−11−18
基金项目：装备技术基础项目（145BZB0027019X）
作者简介：刘金生，正高级工程师。E-mail：275762721@qq.com
通信作者：张兵，副研究员。E-mail：gfkdzb@163.com