Page 77 - 《真空与低温》2025年第3期
P. 77
348 真空与低温 第 31 卷 第 3 期
[4] 杨凯骏,王学军,井文丽,等. MEMS 器件真空封装工艺研 Physics,2013,113(3):034902.
究 [J]. 电子工业专用设备,2010,39(10):5−7. [13] ROSENMAN G,SHUR D,KRASIK Y E,et al. Electron
[5] BASU A,PEREZ A M,VELÁSQUEZ-GARCÍA F L. Minia- emission from ferroelectrics[J]. Journal of Applied Physics,
ture electrostatic,high-vacuum ion pump architecture using a 2000,88(11):6109−6161.
nanostructured field emission electron source[J]. Journal of [14] BROWNRIDGE D J,SHAFROTH M S. Self-focused elec-
Physics:Conference Series,2015,660(1):012027. tron beams produced by pyroelectric crystals on heating or
[6] CHENG Y,HSU W,NAJAFI K,et al. Vacuum packaging cooling in dilute gases[J]. Applied Physics Letters, 2001,
technology using localized aluminum/silicon-to-glass bond- 79(20):3364–3366.
ing[J]. Journal of Microelectromechanical Systems: A Joint [15] BOURIM E M,MOON C W,LEE S W,et al. Pyroelectric
IEEE and ASME Publication on Microstructures,Microactu- electron emission from −Z face polar surface of lithium nio-
ators,Microsensors,and Microsystems,2002,11(5):556−565. bate monodomain single crystal[J]. Journal of Electrocera-
[7] HENMI H,SHOJI S,SHOJI Y,et al. Vacuum packaging for
mics,2006,17(2/4):479−485.
microsensors by glass-silicon anodic bonding[J]. Sensors and
[16] YAP E W,KUMAR N,DAMJANOVIC D,et al. Pyroelec-
Actuators A Physical,1994,43(3):243−248.
tric material property considerations for x-ray generation[J].
[8] 赵彦晴,魏贤龙. 片上微型真空泵的研究进展 [J]. 真空电
Journal of Applied Physics,2022,131(11):114503.
子技术,2022(6):1−13.
[17] BOURIM E M,MOON C W,LEE S W,et al. Investigation
[9] HE X, SCHARER J, BOOSKE J, et al. Modeling of cold
of pyroelectric electron emission from monodomain lithi-
emission cathode by inclusion of combined field and thermio-
um niobate single crystals[J]. Physics B:Condensed Matter,
nic emission processes[J]. Journal of Applied Physics,2007,
2006,383(2):171−182.
102(5):056107.
[18] WHATMORE R W. Pyroelectric devices and materials[J].
[10] GEUTHER A J,DANON Y. Electron and positive ion ac-
Reports on Progress in Physics,1986,49(12):1335.
celeration with pyroelectric crystals[J]. Journal of Applied
[19] SAKAMOTO W K,SHIBATTA-KAGESAWA S T,MELO
Physics,2005,97(7):074109.
W L B. Voltage responsivity of pyroelectric sensor[J]. Sen-
[11] BOUDOT R,MCGILLIGAN J P,MOORE K R,et al. En-
sors & Actuators A:Physical,1999,77(1):28−33.
hanced observation time of magneto-optical traps using mi-
[20] COMPTON K T,VOORHIS C C V. Probability of ioniza-
cro-machined non-evaporable getter pumps[J]. Scientific
tion of gas molecules by electron impacts[J]. Physical Re-
Reports,2020,10(1):16590.
view,1925,26(4):436−453.
[12] HOCKLEY M,HUANG Z. Strong electron and ion emis-
sions induced by a pyroelectric crystal[J]. Journal of Applied (责任编辑:郭 云)
引文信息:孙雷桔,阳芳,毕海林,等. 基于热释电原理的低电压无磁离子泵性能研究[J]. 真空与低温,2025,31(3):343−348.
SUN L J,YANG F,BI H L,et al. Research on the performance of low-voltage non-magnetic ion pump based on pyroelec-
tric principle[J]. Vacuum and Cryogenics,2025,31(3):343−348.