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348                                         真空与低温                                   第 31 卷 第  3  期


              [4]   杨凯骏,王学军,井文丽,等. MEMS     器件真空封装工艺研               Physics,2013,113(3):034902.
                 究  [J]. 电子工业专用设备,2010,39(10):5−7.              [13]   ROSENMAN G,SHUR D,KRASIK Y E,et al. Electron
              [5]   BASU A,PEREZ A M,VELÁSQUEZ-GARCÍA F L. Minia-   emission from ferroelectrics[J]. Journal of Applied Physics,
                 ture electrostatic,high-vacuum ion pump architecture using a  2000,88(11):6109−6161.
                 nanostructured  field  emission  electron  source[J].  Journal  of  [14]   BROWNRIDGE D J,SHAFROTH M S. Self-focused elec-
                 Physics:Conference Series,2015,660(1):012027.      tron beams produced by pyroelectric crystals on heating or
              [6]   CHENG Y,HSU W,NAJAFI K,et al. Vacuum packaging  cooling  in  dilute  gases[J].  Applied  Physics  Letters, 2001,
                 technology  using  localized  aluminum/silicon-to-glass  bond-  79(20):3364–3366.
                 ing[J].  Journal  of  Microelectromechanical  Systems: A  Joint  [15]   BOURIM E M,MOON C W,LEE S W,et al. Pyroelectric
                 IEEE and ASME Publication on Microstructures,Microactu-  electron emission from −Z face polar surface of lithium nio-
                 ators,Microsensors,and Microsystems,2002,11(5):556−565.  bate monodomain single crystal[J]. Journal of Electrocera-
              [7]   HENMI H,SHOJI S,SHOJI Y,et al. Vacuum packaging for
                                                                    mics,2006,17(2/4):479−485.
                 microsensors by glass-silicon anodic bonding[J]. Sensors and
                                                                [16]   YAP E W,KUMAR N,DAMJANOVIC D,et al. Pyroelec-
                 Actuators A Physical,1994,43(3):243−248.
                                                                    tric material property considerations for x-ray generation[J].
              [8]   赵彦晴,魏贤龙. 片上微型真空泵的研究进展           [J]. 真空电
                                                                    Journal of Applied Physics,2022,131(11):114503.
                 子技术,2022(6):1−13.
                                                                [17]   BOURIM E M,MOON C W,LEE S W,et al. Investigation
              [9]   HE  X, SCHARER  J, BOOSKE  J, et  al.  Modeling  of  cold
                                                                    of  pyroelectric  electron  emission  from  monodomain  lithi-
                 emission cathode by inclusion of combined field and thermio-
                                                                    um niobate single crystals[J]. Physics B:Condensed Matter,
                 nic emission processes[J]. Journal of Applied Physics,2007,
                                                                    2006,383(2):171−182.
                 102(5):056107.
                                                                [18]   WHATMORE R W. Pyroelectric devices and materials[J].
              [10]   GEUTHER A J,DANON Y. Electron and positive ion ac-
                                                                    Reports on Progress in Physics,1986,49(12):1335.
                  celeration with pyroelectric crystals[J]. Journal of Applied
                                                                [19]   SAKAMOTO W K,SHIBATTA-KAGESAWA S T,MELO
                  Physics,2005,97(7):074109.
                                                                    W L B. Voltage responsivity of pyroelectric sensor[J]. Sen-
              [11]   BOUDOT R,MCGILLIGAN J P,MOORE K R,et al. En-
                                                                    sors & Actuators A:Physical,1999,77(1):28−33.
                  hanced observation time of magneto-optical traps using mi-
                                                                [20]   COMPTON K T,VOORHIS C C V. Probability of ioniza-
                  cro-machined  non-evaporable  getter  pumps[J].  Scientific
                                                                    tion of gas molecules by electron impacts[J]. Physical Re-
                  Reports,2020,10(1):16590.
                                                                    view,1925,26(4):436−453.
              [12]   HOCKLEY M,HUANG Z. Strong electron and ion emis-
                  sions induced by a pyroelectric crystal[J]. Journal of Applied       (责任编辑:郭 云)
























              引文信息:孙雷桔,阳芳,毕海林,等. 基于热释电原理的低电压无磁离子泵性能研究[J]. 真空与低温,2025,31(3):343−348.
                      SUN L J,YANG F,BI H L,et al. Research on the performance of low-voltage non-magnetic ion pump based on pyroelec-
                      tric principle[J]. Vacuum and Cryogenics,2025,31(3):343−348.
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