Page 72 - 《真空与低温》2025年第3期

第 31 卷 第 3 期 真空与低温
2025 年 5 月 Vacuum and Cryogenics 343

基 于 热 释 电 原 理 的 低 电 压 无 磁 离 子 泵 性 能 研 究

孙雷桔，阳 芳，毕海林，王旭迪，曹 青 *
（合肥工业大学机械工程学院，合肥 230009）

摘要：随着冷原子惯性传感器、小型真空电子元件等对无磁工作环境有严格要求的设备的发展，现有的真空
封装及维持技术难以满足其需求。设计了一种基于热释电原理的低电压无磁离子泵，并开展了原理验证、结构设
计、电子轨迹仿真模拟、抽气性能实验研究等工作。以不同尺寸的钽酸锂（LiTaO 3 ）晶体作为离子泵的电压源、电
子源，并通过控制加热、冷却时间来控制晶体温度变化。搭建了离子泵样机，验证其抽气特性，实验结果表明，所
设计的离子泵在压力 10 Pa 量级真空环境下具有良好的抽气性能，并能够作为辅助泵有效提高分子泵在压力
−3
−6
10 Pa 量级真空环境下的抽气效果。
关键词：热释电；低电压；无磁；小型离子泵
中图分类号：TB752 文献标志码：A 文章编号：1006−7086（2025）03−0343−06
DOI：10.12446/j.issn.1006-7086.2025.03.008

Research on the Performance of Low-voltage Non-magnetic Ion Pump Based on Pyroelectric Principle

*
SUN Leijie，YANG Fang，BI Hailin，WANG Xudi，CAO Qing
（School of Mechanical Engineering，Hefei University of Technology，Hefei 230009，China）

Abstract：With the development of small high-vacuum devices such as gyroscopes，atomic clocks，cold atomic inertial
sensors， and small vacuum electronic components that have strict requirements for low-voltage and non-magnetic working
environments，traditional solutions such as vacuum packaging or getter passive vacuum maintenance technology can provide
a certain vacuum level for these vacuum electronic devices，but there are still problems such as insufficient vacuum level and
high temperature activation，it is generally necessary to incorporate an independent small or micro vacuum pump to achieve
vacuum generation and vacuum maintenance for the vacuum chamber system. In this paper，a low-voltage non-magnetic ion
pump based on pyroelectric principle is designed，and lithium tantalate （LiTaO 3 ） crystals of different sizes are used as the
voltage and electron source to generate the acceleration voltage，suppression voltage and initial emission electrons for the ion
pump，and the temperature change of the crystal is controlled by controlling the heating and cooling time，so as to realize the
control of the voltage and electronic energy provided by the crystal. In this work，the basic principle verification，ion pump
structure design， COMSOL electronic trajectory simulation， pumping performance experimental research and other work
were carried out，and the theoretical feasibility of the designed ion pump was verified. The ion pump prototype was built，and
its pumping characteristics were verified through experiments. The experimental results showed that the designed ion pump
-3
has good pumping performance in a vacuum environment with a pressure of 10 Pa. It can be used as an auxiliary pump to ef-
-6
fectively improve the pumping effect of the molecular pump in a vacuum environment with a pressure of 10 Pa. This work
provides a feasible solution for vacuum generation and maintenance of small vacuum systems in low-voltage and non-mag-
netic environments.
Key words：pyroelectric；low-voltage；non-magnetic；miniature ion pump

0 引言 种高精度传感器和定时设备，如原子钟、陀螺仪、

碱原子的冷原子干涉测量技术可以应用于各 加速度计、磁力计和重力仪等 ，这些系统需要在
[1]

收稿日期：2025−01−04
基金项目：国家重点研发计划项目（2023YFF0717200）；国家自然科学基金青年基金（62101172）；中央高校基本科研业务费
专项资金资助项目（JZ2024HGTG0307）；中国博士后科学基金面上资助项目（2023M743110）
作者简介：孙雷桔，硕士研究生。E-mail：sunlj15705622752@163.com
通信作者：曹青，博士，副教授。E-mail：caoqing@hfut.edu.cn