Page 30 - 《真空与低温》2025年第5期

第 31 卷 第 5 期 真空与低温
2025 年 9 月 Vacuum and Cryogenics 569

基 底 偏 压 对 TiAlN 涂 层 微 观 结 构 及 摩 擦 学 性 能 影 响

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周 敏 ，刘 帅 ，王庆业 ，丁继成 ，郑 军 2*
（1. 广东鼎泰机器人科技有限公司，广东 东莞 523000；2. 安徽工业大学
先进金属材料绿色制备与表面技术教育部重点实验室，安徽 马鞍山 243002）
摘要：采用电弧离子镀技术，在氮气气氛中通过调节基体偏压控制涂层沉积粒子的能量，分别在−50 V、
−100 V、−150 V 偏压下制备了三组不同的 TiAlN 涂层样品。研究结果表明，TiAlN 涂层为柱状结构，随着偏压增
加，涂层组织结构越来越致密。XRD 结果表明涂层为 fcc-（Ti，Al）N 晶相结构。随着偏压增加，TiAlN 涂层硬度呈
现先上升后降低的趋势，在偏压−100 V 时硬度达到最大值 32.1 GPa，这是晶粒细化等多因素共同作用的结果。涂
层摩擦系数和磨损率则随着偏压的增大而增大，在−50 V 偏压时，涂层的摩擦系数最小，为 0.67；磨损率最小，为
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4.17×10 mm /（N·m）。因此，通过调节偏压参数可调控涂层的力学性能和摩擦学性能，为解决硬质合金等基体的
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表面改性问题提供有效途径。
关键词：TiAlN 涂层；电弧离子镀；偏压；显微结构；摩擦学性能
中图分类号：TB79 文献标志码：A 文章编号：1006−7086（2025）05−0569−08
DOI：10.12446/j.issn.1006-7086.2025.05.004

Effect of Bias Voltage on Microstructure and Mechanical Properties of TiAlN Coating

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ZHOU Min ，LIU Shuai ，WANG Qingye ，DING Jicheng ，ZHENG Jun 2*
（1. Guangdong Ucan Robot Technology Co.，Ltd.，Dongguan 523000，Guangdong，China；
2. Key Laboratory of Green Fabrication and Surface Technology of Advanced Metal Materials，
Ministry of Education，Anhui University of Technology，Ma'anshan 243002，Anhui，China）

Abstract：This study systematically investigates the influence of bias voltage on the microstructure and tribological per-
formance of TiAlN coatings deposited via arc ion plating. Three distinct coating samples were synthesized under a nitrogen
atmosphere by applying different substrate bias voltages: –50 V，–100 V，and –150 V. By adjusting the bias voltage, the ener-
gy of deposited ions was effectively controlled，thereby affecting the growth behavior and resulting properties of the coatings.
The morphological features， elemental distribution， and chemical composition of the coatings were examined using field
emission scanning electron microscopy （FE-SEM） coupled with energy dispersive spectroscopy （EDS）. The cross-sectional
images revealed a typical columnar growth structure for all coatings，with a noticeable increase in densification as the bias
voltage was elevated，which could be attributed to the enhanced ion bombardment effect that promoted adatom diffusion and
reduced shadowing effects. X-ray diffraction （XRD） analysis indicated that all coatings maintained a single face-centered cu-
bic （fcc） phase corresponding to （Ti，Al）N，without evidence of secondary phases，suggesting that the bias voltage within
this range did not significantly alter the phase structure. Mechanical properties were assessed via nanoindentation tests，and
the results showed that the hardness of the TiAlN coatings first increased and then decreased as the bias voltage rose from
–50 V to –150 V. The maximum hardness of 32.1 GPa was achieved at –100 V，owing to a combination of factors including
grain refinement，denser microstructure，and compressive stress introduction.Tribological properties were evaluated via ball-
on-disk wear tests under dry sliding conditions. The results indicated that both the friction coefficient and the specific wear
rate increased with higher bias voltages. The sample prepared at –50 V exhibited the best tribological performance，with a

收稿日期：2025−04−10
基金项目：国家重点研发计划（2023YFB3812700）；安徽省教育厅科学研究项目（2022AH050312）；特殊服役环境的智能装备
制造国际科技合作基地开放基金（ISTC2023KF02）；安徽省博士后科学研究项目（2024C988）
作者简介：周敏，硕士，工程师。E-mail：zhoumin_vacuumcoat@126.com
通信作者：郑军，教授。E-mail：jzheng@ahut.edu.cn