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陈 阳等：硅尖锥冷阴极阵列衬底供应电流一致化排布设计 359

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引文信息：陈阳，黄一峰，佘峻聪. 硅尖锥冷阴极阵列衬底供应电流一致化排布设计[J]. 真空与低温，2025，31（3）：354−359.
CHEN Y，HUANG Y F，SHE J C. Arrangement design of Si-tip field emitter array for uniform current supply from the sub-
strate[J]. Vacuum and Cryogenics，2025，31（3）：354−359.