Page 111 - 《摩擦学学报》2021年第5期

第 41 卷 第 5 期 摩 擦 学 学 报 Vol 41 No 5
2021 年 9 月 Tribology Sept, 2021

DOI: 10.16078/j.tribology.2020191

基于不同探针作用下石墨烯边界

效应的摩擦调控

钱 宇, 戴惠良 *
(东华大学 机械工程学院, 上海 201620)

摘 要: 石墨烯作为一种固体润滑剂，广泛应用于微纳机械设备中. 尽可能地减少石墨烯的摩擦是提高器件性能、延
长器件寿命的关键措施. 采用改变石墨烯表面作用区域的方法对石墨烯与探针尖端的摩擦进行了研究. 利用锥形探
针和球形探针测量了石墨烯与SiO 2 /Si基底的边界位置及到石墨烯中心区域之间的平均摩擦力. 结果表明：对于单层
石墨烯，在锥形探针的作用下，石墨烯中心区域的平均摩擦力明显大于其边界区域处的平均摩擦力；而在球形探针
的作用下，石墨烯的平均摩擦力随所选区域的变化不明显. 对于多层石墨烯，在两种探针作用下，石墨烯的平均摩
擦力随所选区域的变化都不明显.
关键词: 石墨烯; 球形探针; 微纳机械装置; 摩擦; 固体润滑剂
中图分类号: TH117 文献标志码: A 文章编号: 1004-0595(2021)05–0700–10

Friction Control of Graphene Boundary Effect
Based on Different Probes

QIAN Yu, DAI Huiliang *

(School of Mechanical Engineering, Donghua University, Shanghai 201620, China)
Abstract: As a solid lubricant, graphene is widely used in micro and nano mechanical devices. Reducing the friction of
graphene as much as possible is the key measure to improve the performance of these devices and extend their life. The
friction between graphene and probe tip is studied by changing the active region of graphene surface. The conical probe
and spherical probe are used to measure the average friction from the boundary region between graphene and SiO 2 /Si
substrate to the central region of graphene. The results show that for single-layer graphene, the average friction force in
the central region of graphene is significantly greater than that in the boundary region under the action of conical probe,
while the average friction force of graphene varies little with the selected region under the action of spherical probe. For
multilayer graphene, the average friction force of graphene varies little with the selected region under the action of two
kinds of probes.
Key words: graphene; spherical probe; micro and nano mechanical device; friction; solid lubricant

[5]
微纳机电系统(MEMS/NEMS)，如数字微镜器件 于设备部件的严重磨损而迅速失效 . 石墨烯作为二
[2]
(DMD) 、喷墨打印机的微喷嘴 和生物芯片 等，对 维材料中的一种，其被称为固体润滑剂，在微纳机电
[3]
[1]
制造业产生了重大影响. 然而，由于粘附和摩擦的存 系统中可用于减少粘附和摩擦 [6-8] . 自2004年石墨烯出
在，微纳机电系统器件的发展和商业化在一定程度上 现 以后，由于其优异的力学性能 [10-11] 、电学性能 [12-13]
[9]
[14]
[4]
受到了限制 . 例如，在真空中运行的MEMS执行器由 和光电性能 ，石墨烯吸引了越来越多的研究者. 鉴

Received 8 September 2020, revised 4 November 2020, accepted 7 December 2020, available online 28 September 2021.
*Corresponding author. E-mail: Daihl@dhu.edu.cn, Tel:+86-13621992491.
The project was supported by the National Natural Science Foundation of China (51905089).
国家自然科学基金项目（51905089）资助.