Page 28 - 《真空与低温》2026年第1期

第 32 卷 第 1 期 真空与低温
2026 年 1 月 Vacuum and Cryogenics 25

磁 悬 浮 转 子 真 空 计 惰 性 气 体 校 准 研 究

宋云见 ，李博文 ，张子凡 ，张虎忠 ，贾文杰 ，李玉成 ，李得天 1,2*
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（1. 兰州空间技术物理研究所 真空技术与物理重点实验室，兰州 730000；
2. 东北大学 机械工程与自动化学院，沈阳 110819）
摘要：在半导体制造及空间环境模拟等工业及科研领域中，需采用磁悬浮转子真空计对 Ar、Kr、Xe 等具有较
大分子质量与黏滞系数的惰性气体进行高精度真空压力测量。本研究基于静态膨胀法，对三种不同型号的磁悬
浮转子真空计在三种惰性气体环境下的实际切向动量传递系数 σ ef 进行了实验校准，并对测量结果的稳定性进行
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了分析，对不确定度进行了评定。结果表明，1×10 ～1 Pa 压力范围内，SRG-2CE 对 Kr 测量结果的稳定性最好，
σ ef 偏差范围为−0.92%～1.68%；三种不同型号的 SRG 对 Ar、Kr、Xe 的 σ ef 校准结果分别为 0.992、0.984、0.999；不
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确定度主要来源于前级压力测量、容积比标定及磁悬浮转子真空计自身测量偏差，高真空范围内相对合成标准不
确定度变化范围为 3.31%～0.77%。
关键词：磁悬浮转子真空计；惰性气体；计量特性；不确定度评定
中图分类号：TB772 文献标志码：A 文章编号：1006-7086（2026）01-0025-06
DOI：10.12446/j.issn.1006-7086.2026.01.003

Study of Calibration of Spinning Rotor Gauge with Inert Gases

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SONG Yunjian ，LI Bowen ，ZHANG Zifan ，ZHANG Huzhong ，JIA Wenjie ，LI Yucheng ，LI Detian 1,2*
（1. Science and Technology on Vacuum Technology and Physics Laboratory，
Lanzhou Institute of Physics，Lanzhou 730000，China；
2. School of Mechanical Engineering and Automation，Northeastern University，Shenyang 110819，China）
Abstract： In the industrial and scientific fields， such as semiconductor fabrication and space environment simulation，
high-precision vacuum pressure measurement is critically required for inert gases including argon （Ar），krypton （Kr），and
xenon （Xe），which are characterized by their relatively high molecular masses and viscosities. The Spinning Rotor Gauge
（SRG） is widely employed for such measurements due to its high accuracy and reliability. This study focuses on the experi-
mental calibration of the effective tangential momentum accommodation coefficient （σ eff ） for three distinct models of spin-
ning rotor gauges （SRGs） under inert conditions， based on the static expansion method —a primary standard tech-

nique for vacuum pressure generation. The calibration process was systematically conducted to determine the σ eff
values，and the stability of the measurement results was thoroughly analyzed. Furthermore，a comprehensive evaluation of the
measurement uncertainty was performed. The experimental results indicate that within the pressure range of 1×10 Pa to 1 Pa，
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the SRG-2CE model demonstrates the best measurement stability for krypton （Kr）， showing a σ eff deviation ranging from
−0.92% to 1.68%. The calibrated σ eff values obtained from the three different SRG models for Ar，Kr，and Xe are 0.992，0.984，
and 0.999，respectively. These values reflect the gases' interaction with the rotor surface and are crucial for accurate pressure
reading conversion. The study identifies that the main sources of measurement uncertainty include inaccuracies in the pre-
pressure measurement，uncertainties associated with the calibration of the volume ratio in the expansion system，and inherent
deviations of the spinning rotor gauges themselves. In the high-vacuum range，the relative combined standard uncertainty is

收稿日期：2025−02−26
基金项目：国家重点研发计划项目（2023YFF0717200）
作者简介：宋云见，硕士研究生。E-mail：hfutlipsyj@163.com
通信作者：李得天，研究员。E-mail：lidetian@hotmail.com