Page 90 - 《摩擦学学报》2020年第5期

第 5 期 王泽勇, 等: 微量Ag元素对TiAlN涂层摩擦学性能的影响 645

TiAlN及不同Ag含量的TiAlAgN涂层. 三种涂层的晶 10.1016/j.tsf.2009.03.082.
粒均以典型的柱状晶方式生长，厚度分别为4.18、 [ 7 ] Yu D, Wang C, Cheng X, et al. Microstructure and properties of
TiAlSiN coatings prepared by hybrid PVD technology[J]. Thin Solid
5.31和4.69 μm. XRD的检测结果表明固体润滑剂Ag
Films, 2009, 517(17): 4950–4955. doi: 10.1016/j.tsf.2009.03.091.
的掺入能够细化晶粒，从而使涂层变得更加致密.
[ 8 ] Carvalho S, Rebouta L, Cavaleiro A, et al. Microstructure and
b. 三种涂层在不同温度下的磨损机理均以黏着
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磨损和磨粒磨损为主. 室温条件下TiAlN涂层的摩擦 Thin Solid Films, 2001, 398: 391–396.
系数达到最小值0.3，并且随着涂层中的Ag含量的上 [ 9 ] Endrino J L, Nainaparampil J J, Krzanowski J E. Microstructure and
升摩擦系数随之增大. 200 ℃时，掺Ag涂层的摩擦系 vacuum tribology of TiC –Ag composite coatings deposited by

数、磨损率均低于TiAlN涂层. 此外，由于此时的磨损 magnetron sputtering-pulsed laser deposition[J]. Surface and
Coatings Technology, 2002, 157(1): 95–101. doi: 10.1016/S0257-
机理为磨粒磨损，所以三种涂层的磨损率均达到最大
8972(02)00138-X.
值. 400 ℃时，两种TiAlAgN涂层的摩擦学性能均优于
[10] Bushroa A R, Masjuki H H, Muhamad M R, et al. Optimized scratch
TiAlN涂层，摩擦系数分别0.45和0.40左右，磨损率分
adhesion for TiSiN coatings deposited by a combination of DC and
3
别为0.020 2×10 和0.017 3×10 mm /(Nm). 600 ℃固 RF sputtering[J]. Surface and Coatings Technology, 2011, 206(7):
−3
−3
体润滑剂Ag已经失去了润滑效果，参与减磨的主要为 1837–1844. doi: 10.1016/j.surfcoat.2011.07.048.
Al O 和TiO ，所以此时的摩擦系数、磨损率均有所增 [11] Chen En. Tribological properties of TiC, Ag, Si and structure
3
2
2
加，并且Ag含量越高涂层的磨损率越大. 总的来说，固 modified TiAlN coatings[D]. Nanchang Hangkong University,
2017(in Chinese) [陈恩. TiC及Ag、Si结构改性的TiAlN涂层摩擦
体润滑剂Ag的掺入能够明显提高TiAlN涂层的耐
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磨性.
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0.2
0.2
和HV 1 398.5，与Ag的含量成反比. 所以当涂层中的 sputtering for tribological applications[J]. Surface and Coatings
0.2
Ag含量增加时，涂层的硬度及结合力均降低. Technology, 2020, 381: 125095. doi: 10.1016/j.surfcoat.2019.125095.
[13] Dang C Q, Li J L, Wang Y, et al. Influence of Ag contents on
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