Page 100 - 《真空与低温》2025年第3期

第 31 卷 第 3 期 真空与低温
2025 年 5 月 Vacuum and Cryogenics 371

基 于 厚 硅 片 的 MEMS 碱 金 属 原 子 气 室 的 制 备 研 究

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呼振宇 ，吴森亮 ，赵彦晴 ，丁祝顺 ，李志伟 ，魏贤龙 1*
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（1. 北京大学电子学院 纳米器件物理与化学教育部重点实验室，北京 100871；
2. 国测量子科技（浙江）有限公司，浙江 湖州 313000）
摘要：碱金属原子气室是原子钟、原子磁力计和原子陀螺仪等量子传感器的核心部件。利用微机电系统
（MEMS）技术实现气室的片上化和微型化，是当前原子气室发展的重要方向。为实现原子气室微型化与光路长度
扩展的协同优化，设计了玻璃/硅/玻璃三层双腔结构，采用激光切割技术加工 3 mm 厚带通孔的硅片，并结合阳极
键合工艺与高功率激光解吸释放剂技术，成功制备了填充 7 kPa 氮气缓冲气体的 MEMS 芯片级铷原子气室。单
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个原子气室尺寸为 6 mm×6 mm×5 mm，光路长度为 3 mm，经氦质谱检漏，键合界面漏率不高于 5×10 −10 Pa·m ·s 。
通过光学实验平台测试，能够测量到铷原子的吸收谱线，说明了该工艺方案的可行性。
关键词：CPT；MEMS 原子气室；碱金属
中图分类号：TB71 文献标志码：A 文章编号：1006−7086（2025）03−0371−06
DOI：10.12446/j.issn.1006-7086.2025.03.013

Research on the Fabrication of MEMS Alkali Metal Atomic Vapor Cell Based on Thick Silicon Chip

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HU Zhenyu ，WU Senliang ，ZHAO Yanqing ，DING Zhushun ，LI Zhiwei ，WEI Xianlong
（1. Key Laboratory for the Physics and Chemistry of Nanodevices，
School of Electronics，Peking University，Beijing 100871，China；
2. Guoce Quantum Technology（Zhejiang）Co.，Ltd. ，Huzhou 313000，Zhejiang，China）

Abstract：Alkali metal atomic vapor cell is the core component of quantum sensors，such as atomic clocks，atomic mag-
netometers，and atomic gyroscopes，which play an important role in quantum precision measurement and aerospace fields.
Among them，atomic clocks based on Coherent Population Trapping（CPT） principle，compared with traditional microwave
clocks，are an important development direction for atomic clock miniaturization due to their small size，low power consump-
tion，and ease of integration，as the physical part does not require a microwave resonant cavity. Using micro electromechani-
cal systems （MEMS） technology to achieve on-chip miniaturized vapor cells is an important direction for the development of
atomic vapor cells. In order to achieve miniaturization of atomic vapor cells while increasing the optical path length，a glass-
silicon-glass three-layer structure with two chambers is designed. A 3 mm thick silicon chip with two chambers and a micro-
channel was processed using laser cutting technology，and a chip-level MEMS rubidium atomic vapor cell containing 7 kPa
N 2 as buffer gas was fabricated using anodic bonding technology and high power laser releasing method. The size of a single
atomic vapor cell is 6 mm×6 mm×5 mm，and the optical path length is 3 mm. Through baking accelerated aging tests on an
atomic vapor cell with a size of 10 mm× 10 mm× 5 mm，it can be observed that rubidium atoms are not significantly lost during
the baking process，and there is a significant quantity of residual rubidium atoms after being left at room temperature for six
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months. Using helium mass spectrometry leak detection，the bonding interface leakage rate is not higher than 5×10 Pa·m ·s .
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Through optical experimental platform testing，four different absorption spectra of Rb and Rb can be measured，demon-
strating the feasibility of this fabrication method and the possibility of wafer processing.
Key words：CPT；MEMS atomic vapor cell；alkali metal

收稿日期：2024−12−16
基金项目：国家自然科学基金（62350040）
作者简介：呼振宇，博士研究生。E-mail：hzy@pku.edu.cn
通信作者：李志伟，理学博士，副研究员 。E-mail：lzw111@pku.edu.cn
魏贤龙，理学博士，长聘副教授。E-mail：weixl@pku.edu.cn